FinFET Having Isolation Structure and Method of Forming the Same

ABSTRACT

A transistor includes a substrate having an upper surface, a fin structure protruding from the upper surface of the substrate, a first isolation structure over the upper surface of the substrate, and a second isolation structure. The fin structure extends along a first direction and comprising a lower portion and an upper portion. The first isolation structure surrounds the lower portion of the fin structure. The second isolation structure is at least partially embedded in the upper portion of the fin structure.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a division of U.S. patent application Ser. No. 14/060,784, filed on Oct. 23, 2013, entitled “FINFET HAVING ISOLATION STRUCTURE AND METHOD OF FORMING THE SAME,” which application is hereby incorporated herein by reference.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapid growth. Technological advances in IC materials and design have produced generations of ICs, where each generation has smaller and more complex circuits than the previous generation. One strategy that has been employed includes using fin field effect transistors (FinFETs). A FinFET device typically includes a fin structure in which channel and source/drain regions thereof are formed. A gate is formed over the fin structure of the FinFET device. Compared with a planar FET having a comparable size, a FinFET has less short channel effect and greater current capacity, because the FinFET has a greater surface area for forming the channel and source/drain regions.

BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not by limitation, in the figures of the accompanying drawings, wherein elements having the same reference numeral designations represent like elements throughout.

FIG. 1 is a perspective view of a FinFET device in accordance with one or more embodiments.

FIG. 2A is a perspective view of a FinFET device having one fin structure in accordance with one or more embodiments.

FIG. 2B is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A in accordance with one or more embodiments.

FIG. 2C is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B in accordance with one or more embodiments.

FIG. 2D is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B in accordance with some other embodiments.

FIG. 2E is a top view of the FinFET of FIG. 2A in accordance with one or more embodiments.

FIG. 2F is a top view of the FinFET of FIG. 2D in accordance with one or more embodiments.

FIG. 3 is a flowchart of a method of fabricating the FinFET of FIG. 2A in accordance with one or more embodiments.

FIGS. 4A-4I are cross-sectional views of the FinFET of FIG. 2A taken along reference plane A or reference plane B at various stage of fabrication in accordance with one or more embodiments.

FIGS. 4J-4K are top views of the FinFET of FIG. 2A in accordance with one or more embodiments.

DETAILED DESCRIPTION

It is understood that the following disclosure provides one or more different embodiments, or examples, for implementing different features of the disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, examples and are not intended to be limiting. In accordance with the standard practice in the industry, various features in the drawings are not drawn to scale and are used for illustration purposes only.

Moreover, spatially relative terms, for example, “lower,” “upper,” “horizontal,” “vertical,” “above,” “below,” “up,” “down,” “top,” “bottom,” “left,” “right,” etc. as well as derivatives thereof (e.g., “horizontally,” “downwardly,” “upwardly,” etc.) are used for ease of the present disclosure of one features relationship to another feature. The spatially relative terms are intended to cover different orientations of the device including the features.

FIG. 1 is a perspective view of a FinFET device 100 in accordance with one or more embodiments. FinFET device 100 includes a substrate 102 having an upper surface 102 a, three fin structures 104, 106, and 108 protruding from upper surface 102 a of substrate 102, a first isolation structure 112 over upper surface 102 a of substrate 102, and a gate electrode 114 over fin structures 104, 106, and 108. Fins structures 104, 106, and 108 extend along a first direction (X direction), and gate electrode 114 extends along a second direction (Y direction) different from the first direction. Fin structures 104, 106, and 108 have upper portions 104 a, 106 a, and 108 a above upper surface 112 a of first isolation structure 112 and lower portions 104 b, 106 b, and 108 b below upper surface 112 a. Gate electrode 114 and fin structures 104, 106, and 108 define a first set of non-overlapping regions of upper portions 104 a, 106 a, and 108 a on the positive X side of gate electrode 114 and a second set of non-overlapping regions of upper portions 104 a, 106 a, and 108 a on the negative X side of gate electrode 114.

In some embodiments, fin structures 104, 106, and 108 share the same gate electrode 114 and collectively constitute a single transistor device in a circuit schematic. Although three fin structures are depicted in FIG. 1, in some embodiments, a transistor device includes more or less than three fin structures.

First isolation structure 112 surrounds lower portions 104 b, 106 b, and 108 b of fin structures 104, 106, and 108. Gate dielectric layers 116 a, 116 b, and 116 c are between gate electrode 114 and corresponding upper portions 104 a, 106 a, and 108 a of fin structures 104, 106, and 108. FinFET device 100 further includes second isolation structures 118 a, 118 b, and 118 c at least partially embedded in corresponding upper portions 104 a, 106 a, and 108 a of fin structures 104, 106, and 108. In the embodiment depicted in FIG. 1, second isolation structures 118 a, 118 b, and 118 c are embedded in the first set of non-overlapping regions of upper portions 104 a, 106 a, and 108 a on the positive X side of gate electrode 114. Gate electrode 114 and gate dielectric layers 116 a, 116 b, and 116 c are also collectively referred to as a gate structure.

In some embodiments, drain contacts (e.g., element 412 in FIG. 4J and FIG. 4K) are formed in the first set of non-overlapping regions of upper portions 104 a, 106 a, and 108 a on the positive X side of gate electrode 114, and source contacts (e.g., element 414) are formed in the second set of non-overlapping regions of upper portions 104 a, 106 a, and 108 a on the negative X side of gate electrode 114. Compared with a FinFET device without second isolation structures 118 a, 118 b, and 118 c, FinFET device 100 has a higher drain-to-source breakdown voltage. In some embodiments, when a FinFET device fabricated by a predetermined fabrication process has a drain-to-source breakdown voltage of about 1.8 volts (V) or less, FinFET device 100 fabricated by the predetermined fabrication process has a drain-to-source breakdown voltage ranging from about 1.8 V to 10 V.

FIG. 2A is a perspective view of a FinFET device 200 having one fin structure in accordance with one or more embodiments. FinFET device 200 depicts a portion of FinFET device 100. In order to facilitate the understanding of FinFET device 100, gate electrode 214 is depicted with dotted lines in FIG. 2A, and gate dielectric layers 116 a, 116 b, and 116 c are omitted. Components similar to those in FIG. 1 are given the same reference numbers. Two reference planes A and B are defined in FIG. 2A. Reference plane A passes through gate electrode 114 and corresponding structures of FinFET 200 directly under gate electrode 114. Reference plane B passes through second isolation structure 118 a. Reference plane A and reference plane B are parallel planes extending in parallel with both Y direction and Z direction.

FIG. 2B is a cross-sectional view of the FinFET 200 of FIG. 2A taken along reference plane A in accordance with one or more embodiments. As depicted in FIG. 2B, upper portion 104 a of fin structure 104 has a first doping region 202 extending along an upper surface 104 c and sidewalls 104 d and 104 e of upper portion 104 a of fin structure 104. Upper portion 104 a of fin structure 104 also has a second doping region 204 further inside the upper portion 104 a and separated from upper surface 104 c and sidewalls 104 d and 104 e of upper portion 104 a by first doping region 202.

In some embodiments, first doping region 202 has a P-type doping if FinFET 200 is an N-type transistor and has an N-type doping if FinFET 200 is a P-type transistor. In some embodiments, second doping region 204 includes a doping type different from that of first doping region 202. In some embodiments, second doping region 204 is omitted. In some embodiments, a portion of second doping region 204 that is directly under the gate electrode 114, such as region 204 in FIG. 2B, is omitted.

FIG. 2C is a cross-sectional view of the FinFET 200 of FIG. 2A taken along reference plane B in accordance with one or more embodiments. First doping region 202 does not extend beyond gate electrode 114, and thus is not shown in FIG. 2C. Upper portion 104 a of fin structure 104 has a height H1 above upper surface 112 a of first isolation structure 112. In some embodiments, height H1 ranges from 100 nanometers (nm) to 500 nm. Second isolation structure 118 a and upper surface 112 a of first isolation structure 112 are vertically separated by a distance H2. In some embodiments, distance H2 is equal to or less than 450 nm. In some embodiments, a lower surface of second isolation structure 118 a is level with upper surface 112 a, and distance H2 is thus equal to 0 nm. In other words, second isolation structure 118 a has a depth D measurable from upper surface 104 c of fin structure 104. In some embodiments, a ratio of depth D to height H1 ranges from 10% to 50%.

Second isolation structure 118 a has a width W1 measurable along Y direction. In some embodiments, width W1 ranges from 5 nm to 50 nm. Second isolation structure 118 a and sidewalls 104 d and 104 e of upper portion 104 a of fin structure 104 are horizontally separated by distances Wa and Wb. In some embodiments, Wa and Wb ranges from 5 nm to 10 nm.

FIG. 2D is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B in accordance with some other embodiments. In some embodiments, FinFET 200′ includes second isolation structure 118 a′ extending through an entire width of upper portion 104 a of fin structure 104. Therefore, in the embodiment depicted in FIG. 2D, Wa and Wb equal to 0 nm.

FIG. 2E is a top view of the FinFET 200 of FIG. 2A in accordance with one or more embodiments. Second isolation structure 118 a has a length L defined along direction X. In some embodiments, length L ranges from 10 nm to 100 nm. Second isolation structure 118 a is horizontally separated from gate electrode 114 by a distance S. In some embodiments, distance S ranges from 20 nm to 60 nm.

FIG. 2F is a top view of the FinFET 200′ of FIG. 2D in accordance with one or more embodiments. As depicted in FIGS. 2D and 2F, in some embodiments, FinFET 200′ includes second isolation structure 118 a′ extending through the entire width of upper portion 104 a of fin structure 104. Therefore, in the embodiment depicted in FIGS. 2D and 2F, Wa and Wb equal to 0 nm.

FIG. 3 is a flowchart of a method 300 of fabricating the FinFET of FIG. 2A in accordance with one or more embodiments. It is understood that additional operations may be performed before, during, and/or after the method 300 depicted in FIG. 3, and that some other processes may only be briefly described herein.

FIGS. 4A-4H are cross-sectional views of the FinFET of FIG. 2A taken along reference plane A or reference plane B at various stage of fabrication in accordance with one or more embodiments. FIGS. 4I-4J are top views of the FinFET of FIG. 2A in accordance with one or more embodiments. Components in FIGS. 4A-4J that are similar or the same to those in FIGS. 2A-2F are given the same reference numbers.

As depicted in FIG. 3, in operation 310, a patterned mask is formed on a substrate. FIG. 4A is a cross-sectional view of the FinFET 200 of FIG. 2A taken along reference plane A or reference plane B after completion of operation 310 in accordance with one or more embodiments. FinFET 200 includes a substrate 402 and a patterned mask 406 formed over substrate 402.

In some embodiments, patterned mask 406 is formed by forming a hard mask layer on substrate 402 and then patterning a hard mask layer. In some embodiments, the hard mask layer includes one or more layers of silicon oxide or silicon nitride. In at least one embodiment, the hard mask layer includes a silicon oxide layer (also referred to as pad oxide layer in some applications) and a silicon nitride layer over the pad oxide layer. In some embodiments, formation of patterned mask 406 includes first forming polysilicon dummy structures over the hard mask layer, forming silicon nitride spacers on sidewalls of the dummy structures, removing the dummy structures, and patterning the hard mask layer to become patterned mask 406 using the silicon nitride spacers as a mask.

In some embodiments, substrate 402 is a silicon substrate or a silicon-on-insulator (SOI) substrate.

As depicted in FIG. 3, in operation 320, a fin structure is formed over the substrate. FIG. 4B is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A or reference plane B after completion of operation 320 in accordance with one or more embodiments. FinFET 200 includes a substrate 102 and a fin structure 104 protruding from an upper surface 102 a of substrate 102. Fin structure 104 has upper surface 104 c and sidewalls 104 f and 104 g.

In some embodiments, fin structure 104 a and substrate 102 are formed by etching a portion of substrate 402 not protected by patterned mask 406. In some embodiments, etching substrate 402 includes performing a dry etch process. In some embodiments, the dry etch process is performed under a source power of about 500 to 700 W, a bias power of about 50 to 70 W, and a pressure of about 1 to 10 mTorr, using CH₂F₂, SF₆, N₂, or He as etching gases.

In some other embodiments, fin structure 104 is epitaxially grown from exposed substrate 402. Therefore, substrate 402 is substantially identical to substrate 102.

In some embodiments after the formation of fin structure 104, a removal process is performed to remove patterned mask 406 and a cleaning process is performed to clean the resulting structure depicted in FIG. 4B. In some embodiments, the cleaning process includes performing a polymer wet dip process.

As depicted in FIG. 3, in operation 330, a first isolation layer is formed over the substrate. FIG. 4C is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A or reference plane B after completion of operation 330 in accordance with one or more embodiments. FinFET 200 includes a first isolation layer 408 over substrate 102 and fin structure 104.

In some embodiments, formation of first isolation layer 408 includes performing a chemical vapor deposition (CVD) process. In some embodiments, prior to performing the CVD process, a liner layer 408 a is formed on sidewalls 104 f and 104 g and upper surface 104 c of fin structure 104. In some embodiments, after performing the CVD process, a chemical-mechanical planarization process is performed to expose the upper surface of fin structure 104.

In some embodiments, liner layer 408 a has a material the same as first isolation layer 408. In some embodiments, liner layer 408 a and first isolation layer include silicon oxide. In some embodiments, liner layer 408 a has a material including silicon oxide or silicon nitride. In some embodiments, liner layer 408 a is formed by performing a thermal oxidation process or another CVD process. In some embodiments, liner layer 408 a may have a thickness of about 100 to 1000 Å. In some embodiments, liner layer 408 a is provided for reducing damage on the surfaces of fin structure 104. In some embodiments, liner layer 408 a is omitted.

In some embodiments, the CVD process for forming a majority of first isolation layer 408 includes a high density plasma (HDP) CVD process or a sub-atmospheric CVD (SACVD). In some embodiments, the HDP CVD process is performed under a low frequency power less than 5000 W, a high frequency power less than 3500 W, a pressure less than 10 mTorr, and a temperature of about 500 to 1000° C., using silane and oxygen as reacting precursors.

As depicted in FIG. 3, in operation 340, a first isolation structure is formed over the substrate. FIG. 4D is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A or reference plane B after completion of operation 340 in accordance with one or more embodiments. FinFET 200 includes a first isolation structure 112 over substrate 102 and surrounding a lower portion 104 b of fin structure 104. First isolation structure 112 has an upper surface 112 a, and upper surface 112 a divided fin structure 104 into upper portion 104 a and lower portion 104 b.

In some embodiments, first isolation structure 112 is formed by recessing first isolation layer 408. In some embodiments, the recessing first isolation layer 408 includes performing a dry etch process or a wet etch process. In some embodiments, the dry etch process is performed using a plasma including tetrafluormethane (CF₄) and/or trifluormethane (CHF₃). In some embodiments, the wet etch process includes dipping the manufacture 200 in hydrofluoric (HF).

As depicted in FIG. 3, in operation 350, a body region is formed in the upper portion of the fin structure. FIG. 4E is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A after completion of operation 350 in accordance with one or more embodiments. FIG. 4F is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B after completion of operation 350 in accordance with one or more embodiments. In a region of upper portion 104 a of fin structure 104 that is going to be directly under gate electrode 114, a first doping region 202 is formed as a body region of FinFET 200 along an upper surface 104 c and sidewalls 104 d and 104 e of upper portion 104 a of fin structure 104. In some embodiments, a second doping region 204 is formed further inside the upper portion 104 a. Second doping region 204 further extends to non-overlapping regions of upper portion 104 a of fin structure 104 that is not going to be directly under gate electrode 114. In some embodiments, second doping region 204 is formed in another operation before or after operation 350. In some embodiments, second doping region 204 is omitted. In some embodiments, a portion of second doping region 204 under the gate electrode 114, such as region 204 in FIG. 4E, is omitted.

In some embodiments, first doping region 202 has a P-type doping if FinFET 200 is an N-type transistor and has an N-type doping if FinFET 200 is a P-type transistor. In some embodiments, second doping region 204 includes a doping type different from that of first doping region 202.

As depicted in FIG. 3, in operation 360, a gate structure is formed over the substrate and the fin structure. FIG. 4G is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane A after completion of operation 360 in accordance with one or more embodiments. FinFET 200 includes a gate structure having a gate electrode 114 over fin structure 104 and a gate dielectric layer 116 a between gate electrode 114 and upper portion 104 a of fin structure 104.

In some embodiments, gate electrode 114 comprises a material including polysilicon or metal. In some embodiments, gate dielectric layer 116 a includes a material including silicon oxide or a dielectric material having a dielectric constant greater than that of silicon oxide.

As depicted in FIG. 3, in operation 370, a recess in the fin structure is formed. FIG. 4H is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B after completion of operation 370 in accordance with one or more embodiments. FinFET 200 has a recess 410 defined in upper portion 104 a of fin structure 104. FIG. 4I is a cross-sectional view of the FinFET of FIG. 2A taken along reference plane B after completion of operation 370 in accordance with some other embodiments. In some embodiments, FinFET 200′ has a recess 410′ extending through the entire width of upper portion 104 a of fin structure 104.

In some embodiments, recess 410 or 410′ is formed by forming another patterned mask, such as a patterned photoresist structure, over fin structure 104 and then performing a dry etch process similar to the dry etch process performed in operation 320.

As depicted in FIG. 3, in operation 380, a second isolation structure is formed at least partially in the recess in the fin structure. FIG. 2C depicts a cross-sectional view of FinFET 200 taken along reference plane B after completion of operation 380 in accordance with one or more embodiments. FIG. 2D depicts a cross-sectional view of FinFET 200′ taken along reference plane B after completion of operation 380 in accordance with one or more embodiments.

In some embodiments, the formation of second isolation structure 118 a or 118 a′ includes filing recess 410 or 410′ by a dielectric material by a CVD process. In some embodiments, forming second isolation structure 118 a or 118 a′ includes forming a second isolation layer by a CVD process similar to that of operation 330 and then performing a dry etch process or a wet etch process similar to that of operation 340 to remove a portion of the second isolation layer that is above upper surface 104 c of fin structure 104.

As depicted in FIG. 3, in operation 390, source and drain contacts are formed in the fin structure. FIG. 4J is a top view of FinFET 200 after completion of operation 390 in accordance with one or more embodiments. FIG. 4K is a top view of FinFET 200′ after completion of operation 390 in accordance with one or more embodiments.

In some embodiments, a first contact region 412 is formed in a non-overlapping region of upper portion 104 a of fin structure 104 on one side of the gate electrode 114. In some embodiments, a second contact region 414 is formed in another non-overlapping region of upper portion 104 a of fin structure 104 on the other side of the gate electrode 114. In some embodiments, first contact region 412 and second isolation structure 118 a are on the same side of the gate electrode 114. In some embodiments, first contact region 412 is used as a drain contact region of FinFET 200 or FinFET 200′, and the corresponding non-overlapping region of upper portion 104 a of fin structure 104 is also referred to as drain region. In some embodiments, second contact region 414 is used as a source contact region of FinFET 200 or FinFET 200′, and the corresponding non-overlapping region of upper portion 104 a of fin structure 104 is also referred to as source region.

In accordance with one embodiment, a transistor includes a substrate having an upper surface, a fin structure protruding from the upper surface of the substrate, a first isolation structure over the upper surface of the substrate, and a second isolation structure. The fin structure extends along a first direction and comprising a lower portion and an upper portion. The first isolation structure surrounds the lower portion of the fin structure. The second isolation structure is at least partially embedded in the upper portion of the fin structure.

In accordance with another embodiment, a method of making a transistor includes forming a fin structure protruding from an upper surface of a substrate. The fin structure extends along a first direction and has a lower portion and an upper portion. A first isolation structure is formed over the upper surface of the substrate and surrounding the lower portion of the fin structure. A recess is formed in the fin structure. A second isolation structure is formed in the recess.

In accordance with another embodiment, a method of making a transistor includes forming a fin structure protruding from an upper surface of a substrate. The fin structure has a lower portion and an upper portion. A gate structure is formed over the fin structure. The gate structure and the fin structure define a drain region in the upper portion of the fin structure and a source region in the upper portion of the fin structure. A recess is formed in the drain region of the fin structure. An isolation structure is formed in the recess.

The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure. 

What is claimed is:
 1. A method of making a transistor, comprising: forming a fin structure protruding from an upper surface of a substrate, the fin structure extending along a first direction and comprising a lower portion and an upper portion; forming a first isolation structure over the upper surface of the substrate and surrounding the lower portion of the fin structure; patterning a recess in the fin structure; and depositing a second isolation structure in the recess.
 2. The method of claim 1, further comprising: forming a gate structure over the fin structure and extending along a second direction different from the first direction, the gate structure and the fin structure defining a non-overlapping region in the upper portion of the fin structure, wherein the forming the recess in the fin structure comprises forming the recess in the non-overlapping region of the fin structure.
 3. The method of claim 2, further comprising: forming a drain contact region in the non-overlapping region of the fin structure, the second isolation structure being between the drain contact region and the gate structure.
 4. The method of claim 1, wherein the forming the recess in the fin structure comprises: removing a portion of the upper portion of the fin structure.
 5. The method of claim 4, wherein the patterning the recess in the fin structure further comprises: forming a patterned photoresist structure over the fin structure, wherein the removing the portion of the upper portion of the fin structure comprises performing a wet etching process or a dry etching process using the patterned photoresist structure as a mask.
 6. The method of claim 1, wherein the forming the recess in the fin structure is performed in a manner that a bottom surface of the recess is above the first isolation structure.
 7. The method of claim 1, wherein the depositing the second isolation structure comprises: performing a chemical vapor deposition (CVD) process.
 8. A method of making a transistor, comprising: forming a fin structure protruding from an upper surface of a substrate, the fin structure comprising a lower portion and an upper portion; forming a gate structure over the fin structure, the gate structure and the fin structure defining a drain region in the upper portion of the fin structure and a source region in the upper portion of the fin structure; patterning a recess in the drain region of the fin structure; and forming an isolation structure in the recess, wherein the isolation structure comprises a dielectric material, and wherein the fin structure surrounds the isolation structure in a top-down view.
 9. The method of claim 8, wherein the forming the recess in the fin structure further comprises: forming a patterned photoresist structure over the fin structure, wherein the removing the portion of the upper portion of the fin structure comprises performing a wet etching process or a dry etching process using the patterned photoresist structure as a mask.
 10. The method of claim 8, wherein the forming the second isolation structure comprises: performing a chemical vapor deposition (CVD) process.
 11. The method of claim 8, further comprising: forming a body region having a predetermined doping type in the upper portion of the fin structure.
 12. The method of claim 8, wherein the fin structure has a first width in a first direction perpendicular with a longitudinal axis of the fin structure, and wherein the recess has a second width in the first direction, the second width being less than the first width.
 13. The method of claim 8, wherein the fin structure has a first width in a first direction perpendicular with a longitudinal axis of the fin structure, and wherein the recess has a second width in the first direction, the second width being at least as large as the first width.
 14. The method of claim 8, further comprising forming a contact to the drain region.
 15. A method comprising: forming a semiconductor fin extending upwards from a substrate; forming a gate stack over and along sidewalls of a first portion of the semiconductor fin; after forming the gate stack, etching a recess in a second portion of the semiconductor fin; and filling the recess with a dielectric material to define an isolation structure extending into the semiconductor fin, wherein top surfaces of the second portion of the semiconductor fin and the isolation structure are substantially level.
 16. The method of claim 15, wherein the etching the recess is performed at least in part with an anisotropic etching process.
 17. The method of claim 15, wherein the etching the recess has a first height that is less than a first height of the semiconductor fin.
 18. The method of claim 15, further comprising forming a contact to the second portion of the semiconductor fin.
 19. The method of claim 15, wherein after the filling the recess the dielectric material extends an entire width of the semiconductor fin.
 20. The method of claim 15, further comprising forming an isolation region around at least a portion of the semiconductor fin, wherein a surface of the isolation region facing away from the substrate is located a first distance away from the substrate and wherein after the filling the recess a surface of the dielectric material facing the substrate is located a second distance away from the substrate, the second distance being greater than the first distance. 